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Thin Films Dashboard
Real-time status, alarms, and events for all Thin Films tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
THIN-001
THIN-002
THIN-003
THIN-004
THIN-005
THIN-006
THIN-007
THIN-008
THIN-009
THIN-010
THIN-011
THIN-012
THIN-013
THIN-014
THIN-015
THIN-016
THIN-017
THIN-018
THIN-019
THIN-020
THIN-021
THIN-022
THIN-023
THIN-024
THIN-025
THIN-026
THIN-027
THIN-028
THIN-029
THIN-030
THIN-031
THIN-032
THIN-033
THIN-034
THIN-035
THIN-036
THIN-037
THIN-038
THIN-039
THIN-040
THIN-041
THIN-042
THIN-043
THIN-044
THIN-045
THIN-046
THIN-047
THIN-048
THIN-049
THIN-050
THIN-051
THIN-052
THIN-053
THIN-054
THIN-055
THIN-056
THIN-057
THIN-058
THIN-059
THIN-060
THIN-061
THIN-062
THIN-063
THIN-064
THIN-065
THIN-066
THIN-067
THIN-068
THIN-069
THIN-070
THIN-071
THIN-072
THIN-073
THIN-074
THIN-075
THIN-076
THIN-077
THIN-078
THIN-079
THIN-080
THIN-081
THIN-082
THIN-083
THIN-084
THIN-085
THIN-086
THIN-087
THIN-088
THIN-089
THIN-090
THIN-091
THIN-092
THIN-093
THIN-094
THIN-095
THIN-096
THIN-097
THIN-098
THIN-099
THIN-100
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
THIN-038
Warning
Chamber pressure unstable
...
THIN-004
Critical
RF power mismatch
...
THIN-064
Critical
Chamber pressure unstable
...
THIN-093
Critical
Precursor delivery system fault
...
THIN-014
Warning
Chamber pressure unstable
...
THIN-055
Minor
RF power mismatch
...
THIN-076
Critical
Precursor delivery system fault
...
THIN-014
Warning
Precursor delivery system fault
...
THIN-010
Minor
Precursor delivery system fault
...
THIN-058
Critical
Chamber pressure unstable
...
THIN-099
Warning
Precursor delivery system fault
...
THIN-031
Warning
Precursor delivery system fault
...
THIN-066
Minor
RF power mismatch
...
THIN-096
Minor
Precursor delivery system fault
...
THIN-015
Warning
Precursor delivery system fault
...
THIN-037
Critical
RF power mismatch
...
THIN-013
Major
Chamber pressure unstable
...
THIN-094
Major
RF power mismatch
...
THIN-036
Critical
RF power mismatch
...
THIN-013
Critical
RF power mismatch
...
THIN-085
Minor
Precursor delivery system fault
...
THIN-096
Warning
RF power mismatch
...
THIN-032
Critical
RF power mismatch
...
THIN-043
Critical
Chamber pressure unstable
...
THIN-099
Warning
RF power mismatch
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
THIN-082
ControlStateChanged
80
...
THIN-087
ControlStateChanged
7
...
THIN-085
MaterialUnloaded
6
...
THIN-017
MaterialLoaded
27
...
THIN-081
MaterialUnloaded
0
...
THIN-047
ControlStateChanged
36
...
THIN-049
MaterialUnloaded
22
...
THIN-005
ProcessingStarted
5
...
THIN-094
ProcessingStarted
18
...
THIN-042
ControlStateChanged
13
...
THIN-017
MaterialLoaded
11
...
THIN-039
MaterialUnloaded
80
...
THIN-053
ControlStateChanged
11
...
THIN-009
MaterialUnloaded
29
...
THIN-076
MaterialLoaded
5
...
THIN-072
ProcessingStarted
19
...
THIN-049
ProcessingCompleted
14
...
THIN-020
ProcessingStarted
2
...
THIN-041
MaterialLoaded
19
...
THIN-028
MaterialLoaded
19
...
THIN-061
MaterialLoaded
77
...
THIN-038
ControlStateChanged
8
...
THIN-067
ControlStateChanged
17
...
THIN-014
ProcessingStarted
24
...
THIN-017
ProcessingStarted
25
...
THIN-063
ProcessingStarted
2
...
THIN-021
MaterialUnloaded
36
...
THIN-099
ProcessingStarted
27
...
THIN-022
ControlStateChanged
93
...
THIN-066
ProcessingStarted
78
...
THIN-030
MaterialUnloaded
32
...
THIN-100
MaterialLoaded
21
...
THIN-080
MaterialLoaded
37
...
THIN-080
MaterialUnloaded
2
...
THIN-018
ProcessingCompleted
21
...
THIN-024
MaterialUnloaded
11
...
THIN-025
ProcessingStarted
98
...
THIN-052
MaterialLoaded
29
...
THIN-058
ProcessingStarted
19
...
THIN-062
ProcessingCompleted
3
...
THIN-007
ProcessingStarted
15
...
THIN-096
ControlStateChanged
23
...
THIN-044
MaterialLoaded
37
...
THIN-008
ControlStateChanged
30
...
THIN-069
ProcessingStarted
29
...
THIN-024
ProcessingStarted
24
...
THIN-021
ProcessingStarted
93
...
THIN-068
ControlStateChanged
86
...
THIN-058
MaterialLoaded
8
...
THIN-005
ProcessingCompleted
17
...