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Thin Films Dashboard
Real-time status, alarms, and events for all Thin Films tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
THIN-001
THIN-002
THIN-003
THIN-004
THIN-005
THIN-006
THIN-007
THIN-008
THIN-009
THIN-010
THIN-011
THIN-012
THIN-013
THIN-014
THIN-015
THIN-016
THIN-017
THIN-018
THIN-019
THIN-020
THIN-021
THIN-022
THIN-023
THIN-024
THIN-025
THIN-026
THIN-027
THIN-028
THIN-029
THIN-030
THIN-031
THIN-032
THIN-033
THIN-034
THIN-035
THIN-036
THIN-037
THIN-038
THIN-039
THIN-040
THIN-041
THIN-042
THIN-043
THIN-044
THIN-045
THIN-046
THIN-047
THIN-048
THIN-049
THIN-050
THIN-051
THIN-052
THIN-053
THIN-054
THIN-055
THIN-056
THIN-057
THIN-058
THIN-059
THIN-060
THIN-061
THIN-062
THIN-063
THIN-064
THIN-065
THIN-066
THIN-067
THIN-068
THIN-069
THIN-070
THIN-071
THIN-072
THIN-073
THIN-074
THIN-075
THIN-076
THIN-077
THIN-078
THIN-079
THIN-080
THIN-081
THIN-082
THIN-083
THIN-084
THIN-085
THIN-086
THIN-087
THIN-088
THIN-089
THIN-090
THIN-091
THIN-092
THIN-093
THIN-094
THIN-095
THIN-096
THIN-097
THIN-098
THIN-099
THIN-100
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
THIN-018
Warning
RF power mismatch
...
THIN-085
Warning
Chamber pressure unstable
...
THIN-070
Critical
Precursor delivery system fault
...
THIN-099
Critical
RF power mismatch
...
THIN-035
Major
RF power mismatch
...
THIN-033
Critical
Chamber pressure unstable
...
THIN-049
Minor
RF power mismatch
...
THIN-076
Critical
Precursor delivery system fault
...
THIN-029
Warning
RF power mismatch
...
THIN-077
Warning
RF power mismatch
...
THIN-090
Major
Precursor delivery system fault
...
THIN-072
Major
Chamber pressure unstable
...
THIN-004
Minor
Chamber pressure unstable
...
THIN-053
Critical
RF power mismatch
...
THIN-037
Warning
Chamber pressure unstable
...
THIN-031
Critical
Chamber pressure unstable
...
THIN-056
Warning
Chamber pressure unstable
...
THIN-056
Warning
RF power mismatch
...
THIN-018
Critical
Chamber pressure unstable
...
THIN-097
Major
Precursor delivery system fault
...
THIN-051
Major
Chamber pressure unstable
...
THIN-092
Warning
Chamber pressure unstable
...
THIN-002
Warning
Precursor delivery system fault
...
THIN-095
Critical
Precursor delivery system fault
...
THIN-099
Major
Chamber pressure unstable
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
THIN-100
ControlStateChanged
38
...
THIN-070
ProcessingStarted
1
...
THIN-011
ProcessingStarted
91
...
THIN-052
MaterialUnloaded
20
...
THIN-094
MaterialLoaded
26
...
THIN-059
ProcessingCompleted
10
...
THIN-095
ProcessingCompleted
8
...
THIN-027
MaterialLoaded
5
...
THIN-076
ProcessingCompleted
25
...
THIN-003
ProcessingCompleted
39
...
THIN-094
ProcessingCompleted
38
...
THIN-067
ProcessingCompleted
37
...
THIN-027
ProcessingStarted
73
...
THIN-083
ProcessingCompleted
38
...
THIN-057
ProcessingStarted
3
...
THIN-005
MaterialUnloaded
17
...
THIN-007
MaterialLoaded
83
...
THIN-002
ProcessingStarted
34
...
THIN-081
ProcessingCompleted
35
...
THIN-038
ProcessingCompleted
19
...
THIN-062
MaterialUnloaded
33
...
THIN-048
ProcessingCompleted
20
...
THIN-072
ProcessingCompleted
0
...
THIN-063
MaterialLoaded
28
...
THIN-012
ProcessingStarted
33
...
THIN-094
ControlStateChanged
33
...
THIN-023
ProcessingStarted
34
...
THIN-001
ProcessingCompleted
0
...
THIN-068
MaterialUnloaded
10
...
THIN-069
MaterialUnloaded
27
...
THIN-097
ControlStateChanged
38
...
THIN-061
ProcessingCompleted
4
...
THIN-051
MaterialUnloaded
2
...
THIN-009
ControlStateChanged
3
...
THIN-063
ProcessingCompleted
91
...
THIN-006
MaterialLoaded
1
...
THIN-018
ControlStateChanged
25
...
THIN-025
ControlStateChanged
96
...
THIN-069
ProcessingCompleted
93
...
THIN-079
MaterialLoaded
86
...
THIN-032
MaterialLoaded
10
...
THIN-061
ProcessingStarted
16
...
THIN-031
MaterialUnloaded
33
...
THIN-046
ControlStateChanged
70
...
THIN-097
MaterialLoaded
8
...
THIN-067
MaterialLoaded
19
...
THIN-004
MaterialLoaded
6
...
THIN-001
MaterialLoaded
7
...
THIN-090
ProcessingCompleted
30
...
THIN-077
ProcessingCompleted
17
...