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Thin Films Dashboard
Real-time status, alarms, and events for all Thin Films tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
THIN-001
THIN-002
THIN-003
THIN-004
THIN-005
THIN-006
THIN-007
THIN-008
THIN-009
THIN-010
THIN-011
THIN-012
THIN-013
THIN-014
THIN-015
THIN-016
THIN-017
THIN-018
THIN-019
THIN-020
THIN-021
THIN-022
THIN-023
THIN-024
THIN-025
THIN-026
THIN-027
THIN-028
THIN-029
THIN-030
THIN-031
THIN-032
THIN-033
THIN-034
THIN-035
THIN-036
THIN-037
THIN-038
THIN-039
THIN-040
THIN-041
THIN-042
THIN-043
THIN-044
THIN-045
THIN-046
THIN-047
THIN-048
THIN-049
THIN-050
THIN-051
THIN-052
THIN-053
THIN-054
THIN-055
THIN-056
THIN-057
THIN-058
THIN-059
THIN-060
THIN-061
THIN-062
THIN-063
THIN-064
THIN-065
THIN-066
THIN-067
THIN-068
THIN-069
THIN-070
THIN-071
THIN-072
THIN-073
THIN-074
THIN-075
THIN-076
THIN-077
THIN-078
THIN-079
THIN-080
THIN-081
THIN-082
THIN-083
THIN-084
THIN-085
THIN-086
THIN-087
THIN-088
THIN-089
THIN-090
THIN-091
THIN-092
THIN-093
THIN-094
THIN-095
THIN-096
THIN-097
THIN-098
THIN-099
THIN-100
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
THIN-031
Critical
RF power mismatch
...
THIN-012
Warning
Precursor delivery system fault
...
THIN-013
Warning
Chamber pressure unstable
...
THIN-064
Warning
RF power mismatch
...
THIN-067
Warning
Precursor delivery system fault
...
THIN-094
Minor
RF power mismatch
...
THIN-052
Critical
Chamber pressure unstable
...
THIN-012
Major
Precursor delivery system fault
...
THIN-073
Warning
RF power mismatch
...
THIN-037
Warning
RF power mismatch
...
THIN-066
Critical
Precursor delivery system fault
...
THIN-008
Warning
Precursor delivery system fault
...
THIN-063
Warning
RF power mismatch
...
THIN-037
Warning
Precursor delivery system fault
...
THIN-023
Critical
RF power mismatch
...
THIN-041
Major
Precursor delivery system fault
...
THIN-079
Warning
Precursor delivery system fault
...
THIN-045
Warning
Precursor delivery system fault
...
THIN-061
Critical
Precursor delivery system fault
...
THIN-071
Minor
Chamber pressure unstable
...
THIN-093
Critical
Chamber pressure unstable
...
THIN-002
Major
RF power mismatch
...
THIN-064
Minor
Chamber pressure unstable
...
THIN-049
Critical
Precursor delivery system fault
...
THIN-090
Minor
Chamber pressure unstable
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
THIN-082
MaterialUnloaded
88
...
THIN-029
ControlStateChanged
9
...
THIN-008
ControlStateChanged
10
...
THIN-095
ControlStateChanged
72
...
THIN-027
MaterialLoaded
38
...
THIN-060
MaterialLoaded
27
...
THIN-007
ControlStateChanged
8
...
THIN-024
MaterialLoaded
21
...
THIN-046
MaterialLoaded
35
...
THIN-009
ProcessingStarted
20
...
THIN-054
ControlStateChanged
8
...
THIN-021
MaterialUnloaded
31
...
THIN-028
ControlStateChanged
33
...
THIN-068
ControlStateChanged
21
...
THIN-045
MaterialLoaded
77
...
THIN-083
ProcessingStarted
24
...
THIN-029
MaterialLoaded
11
...
THIN-018
MaterialLoaded
73
...
THIN-002
ProcessingStarted
29
...
THIN-047
ControlStateChanged
34
...
THIN-062
MaterialUnloaded
35
...
THIN-010
MaterialLoaded
9
...
THIN-012
ProcessingStarted
20
...
THIN-079
ProcessingStarted
20
...
THIN-028
ControlStateChanged
36
...
THIN-013
MaterialUnloaded
72
...
THIN-023
MaterialUnloaded
39
...
THIN-047
MaterialUnloaded
33
...
THIN-046
ProcessingStarted
37
...
THIN-005
ProcessingStarted
9
...
THIN-089
MaterialUnloaded
12
...
THIN-011
MaterialLoaded
78
...
THIN-093
ProcessingCompleted
24
...
THIN-017
MaterialUnloaded
36
...
THIN-010
ControlStateChanged
9
...
THIN-062
ProcessingCompleted
39
...
THIN-051
MaterialUnloaded
15
...
THIN-085
MaterialLoaded
10
...
THIN-037
MaterialUnloaded
16
...
THIN-081
ControlStateChanged
30
...
THIN-082
ControlStateChanged
0
...
THIN-015
ProcessingCompleted
80
...
THIN-014
ProcessingStarted
35
...
THIN-029
MaterialUnloaded
32
...
THIN-063
ProcessingStarted
96
...
THIN-006
ProcessingCompleted
14
...
THIN-068
ProcessingCompleted
84
...
THIN-077
ProcessingStarted
1
...
THIN-012
ProcessingStarted
36
...
THIN-001
ProcessingStarted
35
...